Publication:
Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations
Date
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.date.accessioned | 2021-10-20T10:12:33Z | |
| dc.date.available | 2021-10-20T10:12:33Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20424 | |
| dc.source.conference | Lawrence Symposium on Epitaxy | |
| dc.source.conferencedate | 20/02/2012 | |
| dc.source.conferencelocation | Scottsdale, AZ USA | |
| dc.title | Epitaxial growth of group IV and III-V alloy channel stacks on 300 mm Si substrates for sub-14 nm CMOS generations | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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