Publication:
Effects of pre-amorphization implantation (PAI) in ultra shallow junctions formed by SPER in deep sub-micron devices
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1 since deposited on 2021-10-15
Acq. date: 2025-10-22
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1850 since deposited on 2021-10-15
Acq. date: 2025-10-22
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1 since deposited on 2021-10-15
Acq. date: 2025-10-22
Views
1850 since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations