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Effects of pre-amorphization implantation (PAI) in ultra shallow junctions formed by SPER in deep sub-micron devices
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Acq. date: 2026-03-16
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Acq. date: 2026-03-17
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1 since deposited on 2021-10-15
Acq. date: 2026-03-16
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1855 since deposited on 2021-10-15
1last month
Acq. date: 2026-03-17
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