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Effects of pre-amorphization implantation (PAI) in ultra shallow junctions formed by SPER in deep sub-micron devices
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Acq. date: 2025-12-08
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Acq. date: 2025-12-08
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1 since deposited on 2021-10-15
Acq. date: 2025-12-08
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1854 since deposited on 2021-10-15
2last month
Acq. date: 2025-12-08
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