Publication:
EUV Single Patterning Exploration for Pitch 28 nm
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Acq. date: 2026-10-13
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1680 since deposited on 2021-11-02
Acq. date: 2026-10-13
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Downloads
411 since deposited on 2021-11-02
27last month
14last week
Acq. date: 2026-10-13
Views
1680 since deposited on 2021-11-02
Acq. date: 2026-10-13
Citations