Publication:

Selectivity and Growth Rate Modulations for Ruthenium Area-selective Deposition by Co-Reagent and Nanopattern Design

Date

2024

Journal article

https://doi.org/10.1002/admt.202301820

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Author(s)

Mandal, Akhilesh Kumar

;

van der Veen, Marleen

;

Rahnemaihaghighi, Negin

;

;

Claessens, Niels

;

Meersschaut, Johan

;

Jourdan, Nicolas

;

;

Delabie, Annelies

Journal

ADVANCED MATERIALS TECHNOLOGIES

Statistics

607 since deposited on 2024-01-23

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Acq. date: 2026-04-06