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Selectivity and Growth Rate Modulations for Ruthenium Area-selective Deposition by Co-Reagent and Nanopattern Design
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Selectivity and Growth Rate Modulations for Ruthenium Area-selective Deposition by Co-Reagent and Nanopattern Design
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Date
2024
Journal article
https://doi.org/10.1002/admt.202301820
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mandal, Akhilesh Kumar
;
van der Veen, Marleen
;
Rahnemaihaghighi, Negin
;
Robson, Max
;
Claessens, Niels
;
Meersschaut, Johan
;
Jourdan, Nicolas
;
Tokei, Zsolt
;
Delabie, Annelies
Journal
ADVANCED MATERIALS TECHNOLOGIES
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600
since deposited on 2024-01-23
Acq. date: 2025-12-16
Citations
Metrics
Views
600
since deposited on 2024-01-23
Acq. date: 2025-12-16
Citations