Publication:

Thermal analysis of advanced back-end-of-line structures and the impact of design parameters

Date

2022
Proceedings Paper
https://doi.org/10.1109/itherm54085.2022.9899564
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Accepted version 1.29 MB

Author(s)

Chang, Xinyue  
;
Oprins, Herman  
;
Lofrano, Melina  
;
Vermeersch, Bjorn  
;
Ciofi, Ivan  
;
Varela Pedreira, Olalla  
;
Tokei, Zsolt  
;
De Wolf, Ingrid  

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N/A

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2670 since deposited on 2022-11-16
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1019 since deposited on 2022-11-16
Acq. date: 2026-07-17

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