Publication:
HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?
Date
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Chen, Ping | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.author | Mack, P. | |
| dc.contributor.author | Weber, U. | |
| dc.contributor.author | Lehnen, P. | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.date.accessioned | 2021-10-16T01:01:15Z | |
| dc.date.available | 2021-10-16T01:01:15Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10251 | |
| dc.source.conference | SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry | |
| dc.source.conferencedate | 12/09/2005 | |
| dc.source.conferencelocation | Manchester UK | |
| dc.title | HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS? | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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