Publication:
Process-induced charging damage in IGZO nTFTs
| dc.contributor.author | Hiblot, Gaspard | |
| dc.contributor.author | Rassoul, Nouredine | |
| dc.contributor.author | Teugels, Lieve | |
| dc.contributor.author | Devriendt, Katia | |
| dc.contributor.author | Vaisman Chasin, Adrian | |
| dc.contributor.author | van Setten, Michiel | |
| dc.contributor.author | Belmonte, Attilio | |
| dc.contributor.author | Delhougne, Romain | |
| dc.contributor.author | Kar, Gouri Sankar | |
| dc.contributor.imecauthor | Hiblot, Gaspard | |
| dc.contributor.imecauthor | Rassoul, Nouredine | |
| dc.contributor.imecauthor | Teugels, Lieve | |
| dc.contributor.imecauthor | Devriendt, Katia | |
| dc.contributor.imecauthor | Vaisman Chasin, Adrian | |
| dc.contributor.imecauthor | van Setten, Michiel | |
| dc.contributor.imecauthor | Belmonte, Attilio | |
| dc.contributor.imecauthor | Delhougne, Romain | |
| dc.contributor.imecauthor | Kar, Gouri Sankar | |
| dc.contributor.orcidimec | Hiblot, Gaspard::0000-0002-3869-965X | |
| dc.contributor.orcidimec | Rassoul, Nouredine::0000-0001-9489-3396 | |
| dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
| dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
| dc.contributor.orcidimec | van Setten, Michiel::0000-0003-0557-5260 | |
| dc.contributor.orcidimec | Vaisman Chasin, Adrian::0000-0002-9940-0260 | |
| dc.date.accessioned | 2022-03-11T14:19:48Z | |
| dc.date.available | 2022-03-11T14:19:48Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IRPS46558.2021.9405201 | |
| dc.identifier.eisbn | 978-1-7281-6893-7 | |
| dc.identifier.issn | 1541-7026 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39421 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Reliability Physics Symposium (IRPS) | |
| dc.source.conferencedate | MAR 21-24, 2021 | |
| dc.source.conferencelocation | Virtual | |
| dc.source.journal | na | |
| dc.source.numberofpages | 8 | |
| dc.subject.keywords | PLASMA-INDUCED DAMAGE | |
| dc.subject.keywords | HYDROGEN | |
| dc.subject.keywords | MECHANISM | |
| dc.title | Process-induced charging damage in IGZO nTFTs | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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