Publication:

Study on photoelectricity properties of SiCN thin films prepared by magnetron sputtering

Date

2021
Journal article
https://doi.org/10.1016/j.jmrt.2021.08.043
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Author(s)

Li, Qiang
;
Chen, Cheng
;
Wang, Mingge
;
Lv, Yaohui
;
Mao, Yulu
;
Xu, Manzhang
;
Wang, Yingnan
;
Wang, Xuewen
;
Zhang, Zhiyong
;
Wang, Shouguo
;
Zhao, Wu
;
Stiens, Johan  

Journal

JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T

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177 since deposited on 2022-01-02
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