Publication:

Tuning strain in nanosheet devices

Date

2021

Meeting abstract

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Author(s)

;

;

Veloso, Anabela

;

Hikavyy, Andriy

;

De Keersgieter, An

;

Horiguchi, Naoto

;

Richard, Olivier

;

Metrics

1833 since deposited on 2021-10-31

Acq. date: 2025-12-15