Publication:

Tuning strain in nanosheet devices

Date

2021
Meeting abstract
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dc.contributor.authorFavia, Paola
dc.contributor.authorEneman, Geert
dc.contributor.authorVeloso, Anabela
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-31T08:36:57Z
dc.date.available2021-10-31T08:36:57Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36706
dc.source.conferenceMicroscopy Conference 2021 & Multinational Conference on Microscopy 2021
dc.source.conferencedate22/08/2021
dc.source.conferencelocationonline online
dc.title

Tuning strain in nanosheet devices

dc.typeMeeting abstract
dspace.entity.typePublication
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