Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Reliability of Barrierless PVD Mo
Publication:
Reliability of Barrierless PVD Mo
Copy permalink
Date
2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537545
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Accepted version
541.55 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tierno, Davide
;
Hosseini, Maryam
;
van der Veen, Marleen
;
Dangol, Anish
;
Croes, Kristof
;
Demuynck, Steven
;
Tokei, Zsolt
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
Journal
na
Abstract
Description
Metrics
Downloads
201
since deposited on 2022-05-05
11
last month
3
last week
Acq. date: 2025-12-15
Views
1662
since deposited on 2022-05-05
2
last month
Acq. date: 2025-12-15
Citations
Metrics
Downloads
201
since deposited on 2022-05-05
11
last month
3
last week
Acq. date: 2025-12-15
Views
1662
since deposited on 2022-05-05
2
last month
Acq. date: 2025-12-15
Citations