Publication:

Reliability of Barrierless PVD Mo

Date

2021
Proceedings Paper
https://doi.org/10.1109/IITC51362.2021.9537545
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dc.contributor.authorTierno, Davide
dc.contributor.authorHosseini, Maryam
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorDangol, Anish
dc.contributor.authorCroes, Kristof
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorTierno, Davide
dc.contributor.imecauthorHosseini, Maryam
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorDangol, Anish
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecTierno, Davide::0000-0003-4915-904X
dc.contributor.orcidimecHosseini, Maryam::0000-0002-0210-4095
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2022-06-09T07:20:17Z
dc.date.available2022-05-05T02:17:27Z
dc.date.available2022-05-10T08:17:24Z
dc.date.available2022-06-09T07:20:17Z
dc.date.issued2021
dc.identifier.doi10.1109/IITC51362.2021.9537545
dc.identifier.eisbn978-1-7281-7632-1
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39742
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedateJUL 06-09, 2021
dc.source.conferencelocationKyoto
dc.source.journalna
dc.source.numberofpages3
dc.subject.disciplineEngineering
dc.subject.keywordsBEOL, MOL, Reliability, Mo
dc.title

Reliability of Barrierless PVD Mo

dc.typeProceedings paper
dspace.entity.typePublication
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