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Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction
Publication:
Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dortu, Fabian
;
Bogdanowicz, Janusz
;
Clarysse, Trudo
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
Abstract
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1902
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Acq. date: 2026-01-26
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Statistics
Views
1902
since deposited on 2021-10-16
1
last month
Acq. date: 2026-01-26
Citations