Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction

dc.contributor.author	Dortu, Fabian
dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Clarysse, Trudo
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Bogdanowicz, Janusz
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Bogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned	2021-10-16T15:55:08Z
dc.date.available	2021-10-16T15:55:08Z
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12095
dc.source.beginpage	53107
dc.source.issue	5
dc.source.journal	Journal of Applied Physics
dc.source.volume	101
dc.title	Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction
dc.type	Journal article
dspace.entity.type	Publication
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