The effect of patterning options on embedded memory cells in logic technologies at iN10 and iN7

Publication:

2017

Proceedings Paper

Author(s)

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;

Raghavan, Praveen

;

Kim, Ryan Ryoung han

;

;

;

Van der Perre, Liesbet

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1873 since deposited on 2021-10-24

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Acq. date: 2025-12-16