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Articles
Accurate fin patterning in emerging devices for 32nm and beyond
Publication:
Accurate fin patterning in emerging devices for 32nm and beyond
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Snoeckx, Koen
;
Rooyackers, Rita
;
Jurczak, Gosia
;
Dixit, Abhisek
Journal
Future Fab
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1899
since deposited on 2021-10-16
Acq. date: 2026-07-17
Citations
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Views
1899
since deposited on 2021-10-16
Acq. date: 2026-07-17
Citations