Publication:
Accurate fin patterning in emerging devices for 32nm and beyond
Date
| dc.contributor.author | Snoeckx, Koen | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Jurczak, Gosia | |
| dc.contributor.author | Dixit, Abhisek | |
| dc.contributor.imecauthor | Snoeckx, Koen | |
| dc.contributor.imecauthor | Jurczak, Gosia | |
| dc.date.accessioned | 2021-10-16T19:53:19Z | |
| dc.date.available | 2021-10-16T19:53:19Z | |
| dc.date.issued | 2007-07 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12926 | |
| dc.source.beginpage | 68 | |
| dc.source.endpage | 70 | |
| dc.source.issue | 23 | |
| dc.source.journal | Future Fab | |
| dc.title | Accurate fin patterning in emerging devices for 32nm and beyond | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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