Elevated co-silicide for sub-100nm high performance and RF CMOS

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Author(s)

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de Potter de ten Broeck, Muriel

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Rooyackers, Rita

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Jeamsaksiri, Wutthinan

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Redolfi, Augusto

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Lindsay, Richard

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Augendre, Emmanuel

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Badenes, Gonçal

Metrics

1923 since deposited on 2021-10-14

Acq. date: 2025-12-08