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Morphological characterization and mechanical behavior by dicing and thinning on direct bonded Si wafer
Publication:
Morphological characterization and mechanical behavior by dicing and thinning on direct bonded Si wafer
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Date
2020
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Inoue, Fumihiro
;
Podpod, Arnita
;
Peng, Lan
;
Phommahaxay, Alain
;
Rebibis, Kenneth June
;
Uedono, Akira
;
Beyne, Eric
Journal
Journal of Manufacturing Processes
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2062
since deposited on 2021-10-28
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Acq. date: 2025-12-12
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Metrics
Views
2062
since deposited on 2021-10-28
1
last month
1
last week
Acq. date: 2025-12-12
Citations