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A practical alternating PSM modeling and OPC approach to deal with 3D mask effects for the 65nm node and beyond
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1912 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-11
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Metrics
Views
1912 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-11
Citations