Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Al2O3/InGaAs metal-oxide-semiconductor interface properties: impact of Gd2O3 and Sc2O3 interfacial layers by atomic layer deposition
Publication:
Al2O3/InGaAs metal-oxide-semiconductor interface properties: impact of Gd2O3 and Sc2O3 interfacial layers by atomic layer deposition
Copy permalink
Date
2014
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ameen, Mahmoud
;
Nyns, Laura
;
Sioncke, Sonja
;
Lin, Dennis
;
Ivanov, Tsvetan
;
Conard, Thierry
;
Meersschaut, Johan
;
Feteha, M. Y.
;
Van Elshocht, Sven
;
Delabie, Annelies
Journal
ECS Journal of Solid State Science and Technology
Abstract
Description
Metrics
Views
1932
since deposited on 2021-10-22
Acq. date: 2026-01-11
Citations
Metrics
Views
1932
since deposited on 2021-10-22
Acq. date: 2026-01-11
Citations