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Metrology at imec : a center of excellence enabling fundamental understanding of process and materials development
Publication:
Metrology at imec : a center of excellence enabling fundamental understanding of process and materials development
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Date
2011
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23192.pdf
221.3 KB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
Journal
Abstract
Description
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1836
since deposited on 2021-10-19
Acq. date: 2025-12-16
Citations
Metrics
Views
1836
since deposited on 2021-10-19
Acq. date: 2025-12-16
Citations