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Metrology at imec : a center of excellence enabling fundamental understanding of process and materials development

Date

2011
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-19T20:38:34Z
dc.date.available2021-10-19T20:38:34Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20010
dc.source.conferenceInternational Conference on Frontiers of Characterization and Metrology for Nanoelectronics
dc.source.conferencedate23/05/2011
dc.source.conferencelocationGrenoble France
dc.title

Metrology at imec : a center of excellence enabling fundamental understanding of process and materials development

dc.typeOral presentation
dspace.entity.typePublication
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