Publication:

Chemisorption of ALD precursors in and on porous low-k films

Date

2013

Journal article

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Files

26500.pdf 622.24 KB

Author(s)

Verdonck, Patrick

;

Delabie, Annelies

;

;

;

Baklanov, Mikhaïl

;

;

Van Besien, Els

;

Witters, Thomas

;

;

Van Elshocht, Sven

Journal

Microelectronic Engineering

Statistics

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