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45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μm
Publication:
45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μm
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Henson, Kirklen
;
Lander, Rob
;
Demand, Marc
;
Dachs, Charles
;
Kaczer, Ben
;
Deweerd, Wim
;
Schram, Tom
;
Tokei, Zsolt
;
Hooker, Jacob
;
Cubaynes, Florence
;
Beckx, Stephan
;
Boullart, Werner
;
Coenegrachts, Bart
;
Vertommen, Johan
;
Richard, Olivier
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Kaiser, M.
;
Everaert, Jean-Luc
;
Jurczak, Gosia
;
Biesemans, Serge
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2104
since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations
Metrics
Views
2104
since deposited on 2021-10-15
Acq. date: 2025-10-22
Citations