Publication:

45nm nMOSFET with metal gate on thin SiON driving 1150μA/μm and off-state of 10nA/μm

Date

2004
Proceedings Paper
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Author(s)

Henson, Kirklen
;
Lander, Rob
;
Demand, Marc  
;
Dachs, Charles
;
Kaczer, Ben  
;
Deweerd, Wim
;
Schram, Tom  
;
Tokei, Zsolt  
;
Hooker, Jacob
;
Cubaynes, Florence
;
Beckx, Stephan  
;
Boullart, Werner  
;
Coenegrachts, Bart  
;
Vertommen, Johan
;
Richard, Olivier  
;
Bender, Hugo  
;
Vandervorst, Wilfried  
;
Kaiser, M.
;
Everaert, Jean-Luc
;
Jurczak, Gosia  
;
Biesemans, Serge  

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