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Orientation dependence of Si1-xCx:P growth and the impact on FiNFET structures
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1934 since deposited on 2021-10-20
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Acq. date: 2025-10-24
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Views
1934 since deposited on 2021-10-20
412item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations