Publication:

Multiple-Vt FinFET devices through La2O3 dielectric capping

Date

2008

Proceedings Paper

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Author(s)

Witters, Liesbeth

;

Veloso, Anabela

;

Ferain, Isabelle

;

;

Collaert, Nadine

;

;

Adelmann, Christoph

;

Meersschaut, Johan

;

;

;

;

;

Kubicek, Stefan

;

De Meyer, Kristin

;

Biesemans, Serge

;

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1993 since deposited on 2021-10-17

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Acq. date: 2026-08-18