Publication:

Multiple-Vt FinFET devices through La2O3 dielectric capping

Date

2008
Proceedings Paper
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dc.contributor.authorWitters, Liesbeth
dc.contributor.authorVeloso, Anabela
dc.contributor.authorFerain, Isabelle
dc.contributor.authorDemand, Marc
dc.contributor.authorCollaert, Nadine
dc.contributor.authorSon, Nak Jin
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorVos, Rita
dc.contributor.authorRohr, Erika
dc.contributor.authorWada, Masayuki
dc.contributor.authorSchram, Tom
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorBiesemans, Serge
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-17T12:48:53Z
dc.date.available2021-10-17T12:48:53Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14790
dc.source.beginpage121
dc.source.conferenceIEEE International SOI Conference Proceedings
dc.source.conferencedate6/10/2008
dc.source.conferencelocationNew Paltz, NY USA
dc.source.endpage122
dc.title

Multiple-Vt FinFET devices through La2O3 dielectric capping

dc.typeProceedings paper
dspace.entity.typePublication
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