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Integrated diffusion - recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials
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1789 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-12
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1789 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-12
Citations