Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
The fate of the (reactive) primary ion: sputtering and desorption
Publication:
The fate of the (reactive) primary ion: sputtering and desorption
Copy permalink
Date
2008
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16723.pdf
730.21 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Janssens, Tom
;
Huyghebaert, Cedric
;
Berghmans, Bart
Journal
Applied Surface Science
Abstract
Description
Metrics
Views
1898
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1898
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-15
Citations