Publication:

The fate of the (reactive) primary ion: sputtering and desorption

Date

2008
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBerghmans, Bart
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-17T12:13:22Z
dc.date.available2021-10-17T12:13:22Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14706
dc.source.beginpage1206
dc.source.endpage1214
dc.source.issue4
dc.source.journalApplied Surface Science
dc.source.volume255
dc.title

The fate of the (reactive) primary ion: sputtering and desorption

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
16723.pdf
Size:
730.21 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles