Publication:
Titanium silicide on Si:P with precontact amorphization implantation treatment: contact resistivity approaching 1×10-9 Ohm-cm²
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
1 since deposited on 2021-10-23
Acq. date: 2025-10-24
Views
1988 since deposited on 2021-10-23
Acq. date: 2025-10-24
Citations
Metrics
Downloads
1 since deposited on 2021-10-23
Acq. date: 2025-10-24
Views
1988 since deposited on 2021-10-23
Acq. date: 2025-10-24
Citations