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CMP processing to enable 3D stacked IC integration
Publication:
CMP processing to enable 3D stacked IC integration
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vaes, Jan
;
Heylen, Nancy
;
Van Olmen, Jan
;
Huyghebaert, Cedric
;
Leunissen, Peter
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Abstract
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2015
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Acq. date: 2026-02-28
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Views
2015
since deposited on 2021-10-18
3
last month
1
last week
Acq. date: 2026-02-28
Citations