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Conference contributions
Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
Publication:
Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Akheyar, Amal
;
Lauwers, Anne
;
Kittl, Jorge
;
de Potter de ten Broeck, Muriel
;
Chamirian, Oxana
;
Jonckheere, Rik
;
Leunissen, Peter
;
Van Dal, Mark
;
Lindsay, Richard
;
Tempel, Georg
;
Maex, Karen
Journal
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1980
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1980
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations