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Hydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopy
Publication:
Hydrogen passivation of HF last cleaned (100) silicon surfaces investigated by multiple internal reflection infrared spectroscopy
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Date
1994
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Verhaverbeke, Steven
;
Heyns, Marc
Journal
Journal of the Electrochemical Society
Abstract
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33225
since deposited on 2021-09-29
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Acq. date: 2025-12-15
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Metrics
Views
33225
since deposited on 2021-09-29
2
last month
Acq. date: 2025-12-15
Citations