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Analysis of diffusion mechanisms for SSD in confined volumes : An alternative solution for extension formation in N7 and N5 technologies
Publication:
Analysis of diffusion mechanisms for SSD in confined volumes : An alternative solution for extension formation in N7 and N5 technologies
Date
2018
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Pawlak, Bartek
;
De Keersgieter, An
;
Kikuchi, Yoshiaki
;
Mitard, Jerome
;
Horiguchi, Naoto
;
Mocuta, Dan
;
Mocuta, Anda
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Abstract
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1993
since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations
Metrics
Views
1993
since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations