Publication:

Experimental-Modeling Framework for Identifying Defects Responsible for Reliability Issues in 2D FETs

 
dc.contributor.authorPanarella, Luca
dc.contributor.authorTyaginov, Stanislav
dc.contributor.authorKaczer, Ben
dc.contributor.authorSmets, Quentin
dc.contributor.authorVerreck, Devin
dc.contributor.authorMakarov, Alexander
dc.contributor.authorSchram, Tom
dc.contributor.authorLin, Dennis
dc.contributor.authorLockhart de la Rosa, Cesar Javier
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorAfanasiev, Valeri
dc.contributor.imecauthorPanarella, Luca
dc.contributor.imecauthorTyaginov, Stanislav
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorVerreck, Devin
dc.contributor.imecauthorMakarov, Alexander
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorLockhart de la Rosa, Cesar Javier
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.orcidimecTyaginov, Stanislav::0000-0002-5348-2096
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecVerreck, Devin::0000-0002-3833-5880
dc.contributor.orcidimecMakarov, Alexander::0000-0002-9927-6511
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecLin, Dennis::0000-0002-1577-6050
dc.contributor.orcidimecLockhart de la Rosa, Cesar Javier::0000-0002-1401-0141
dc.contributor.orcidimecAfanasiev, Valeri::0000-0001-5018-4539
dc.date.accessioned2025-04-03T08:59:33Z
dc.date.available2024-11-10T17:04:20Z
dc.date.available2025-04-03T08:59:33Z
dc.date.issued2024
dc.description.wosFundingTextThis work was done in the imec IIAP core CMOS programs and supported by The Research FoundationFlanders (FWO Grant 1S72625N). Fundings were received from the European Union's Horizon 2020 research and innovation program under Grant Agreement 952792 (2D-EPL).
dc.identifier.doi10.1021/acsami.4c10888
dc.identifier.issn1944-8244
dc.identifier.pmidMEDLINE:39465649
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44770
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage62314
dc.source.endpage62325
dc.source.issue45
dc.source.journalACS APPLIED MATERIALS & INTERFACES
dc.source.numberofpages12
dc.source.volume16
dc.subject.keywordsATOMIC LAYER DEPOSITION
dc.subject.keywordsFIELD-EFFECT TRANSISTORS
dc.subject.keywords2-DIMENSIONAL MATERIALS
dc.subject.keywordsAL2O3
dc.subject.keywordsSILICON
dc.subject.keywordsGATE
dc.subject.keywordsHETEROSTRUCTURES
dc.subject.keywordsPERFORMANCE
dc.title

Experimental-Modeling Framework for Identifying Defects Responsible for Reliability Issues in 2D FETs

dc.typeJournal article
dspace.entity.typePublication
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