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Characterization of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy
Publication:
Characterization of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nohira, Hiroshi
;
Tsai, Wilman
;
Besling, Wim
;
Young, Edward
;
Pétry, Jasmine
;
Conard, Thierry
;
Vandervorst, Wilfried
;
De Gendt, Stefan
;
Heyns, Marc
;
Maes, Jos
;
Tuominen, Marko
Journal
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2033
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2033
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations