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Progressive degradation of TiN/SiON and TiN'/HfO2 gate stack triple gate SOI nFinFETs subjected to electrical stress
Publication:
Progressive degradation of TiN/SiON and TiN'/HfO2 gate stack triple gate SOI nFinFETs subjected to electrical stress
Date
2009
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rafi, J.M.
;
Simoen, Eddy
;
Mercha, Abdelkarim
;
Collaert, Nadine
;
Campabadal, F.
;
Claeys, Cor
Journal
Journal of Vacuum Science and Technology B
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1925
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Metrics
Views
1925
since deposited on 2021-10-18
407
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations