Publication:

Low-Voltage Aberration-Corrected SEM Metrology of Thin Resist for High-NA EUVL

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2613990
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Author(s)

Zidan, Mohamed  
;
Fischer, Daniel
;
Lorusso, Gian  
;
Severi, Joren  
;
De Simone, Danilo  
;
Moussa, Alain  
;
Muellender, Angelika
;
Mack, Chris A.
;
Charley, Anne-Laure  
;
Leray, Philippe  
;
De Gendt, Stefan  

Journal

Proceedings of SPIE

Abstract

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1451 since deposited on 2022-09-08
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1451 since deposited on 2022-09-08
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Acq. date: 2025-10-25

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