Publication:

Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation

Date

Loading...
Thumbnail Image

Abstract

Description

Statistics

Views

1955 since deposited on 2021-09-29
Acq. date: 2026-04-08

Citations

Statistics

Views

1955 since deposited on 2021-09-29
Acq. date: 2026-04-08

Citations