Publication:
Anomalous low-temperature dopant diffusion from in-situ doped polycrystalline and epitaxial Si layers into the monocrystalline Si substrate
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33232 since deposited on 2021-09-29
Acq. date: 2025-10-27
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Views
33232 since deposited on 2021-09-29
Acq. date: 2025-10-27
Citations