Publication:
Anomalous low-temperature dopant diffusion from in-situ doped polycrystalline and epitaxial Si layers into the monocrystalline Si substrate
Date
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-09-29T12:40:03Z | |
| dc.date.available | 2021-09-29T12:40:03Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/70 | |
| dc.source.beginpage | 387 | |
| dc.source.endpage | 390 | |
| dc.source.issue | 1 | |
| dc.source.journal | J. Vac. Sci. Technol. B | |
| dc.source.volume | 12 | |
| dc.title | Anomalous low-temperature dopant diffusion from in-situ doped polycrystalline and epitaxial Si layers into the monocrystalline Si substrate | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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