Publication:

Selective removal of Ni for salicidation and fully silicided gates

Date

2005

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Fano Leston, V.

;

;

;

de Potter de ten Broeck, Muriel

;

;

;

Metrics

1842 since deposited on 2021-10-16

Acq. date: 2025-12-09