Publication:
Influence of precursor gas source on defect properties in Si1xGex epitaxial thin films
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1882 since deposited on 2021-10-22
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Acq. date: 2026-07-31
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Statistics
Views
1882 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-07-31
Citations