Publication:
Influence of precursor gas source on defect properties in Si1xGex epitaxial thin films
Date
| dc.contributor.author | Ike, Shinichi | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Shimura, Yosuke | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Takeuchi, Wakana | |
| dc.contributor.author | Nakatsuka, Osamu | |
| dc.contributor.author | Zaima, Shigeaki | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-22T19:49:41Z | |
| dc.date.available | 2021-10-22T19:49:41Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25411 | |
| dc.source.conference | Meeting in the Division of Crystals Science and Technology of JSAP (Japan Society of Applied Physics) | |
| dc.source.conferencedate | 29/10/2015 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.title | Influence of precursor gas source on defect properties in Si1xGex epitaxial thin films | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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