Publication:
Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication
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1534 since deposited on 2021-11-02
1last month
Acq. date: 2025-12-16
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Metrics
Views
1534 since deposited on 2021-11-02
1last month
Acq. date: 2025-12-16
Citations