Publication:

Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication

Date

2021
Journal article
https://doi.org/10.1021/acsanm.1c00773
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dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecZahedmanesh, Houman::0000-0002-0290-691X
dc.contributor.orcidimecVega Gonzalez, Victor::0000-0002-4320-0585
dc.date.accessioned2022-09-22T08:12:19Z
dc.date.available2021-11-02T15:59:57Z
dc.date.available2022-09-06T12:32:35Z
dc.date.available2022-09-22T08:12:19Z
dc.date.issued2021
dc.identifier.doi10.1021/acsanm.1c00773
dc.identifier.issn2574-0970
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37799
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage5643
dc.source.endpage5648
dc.source.issue6
dc.source.journalACS APPLIED NANO MATERIALS
dc.source.numberofpages6
dc.source.volume4
dc.subject.keywordsSTRESS GENERATION
dc.subject.keywordsBRITTLE
dc.subject.keywordsSURFACE
dc.subject.keywordsCOALESCENCE
dc.subject.keywordsCONTACT
dc.subject.keywordsMODEL
dc.title

Nano-Ridge Bending during Conformal Ruthenium Metallization: Implications for Interconnect Fabrication

dc.typeJournal article
dspace.entity.typePublication
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