Publication:

The impact of backside particles on the limits of optical lithography

Date

2004
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Author(s)

Bearda, Twan
;
Mertens, Paul  
;
Holsteyns, Frank  
;
De Bisschop, Peter  
;
Compen, R.
;
van Meer, R.
;
Heyns, Marc  

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1895 since deposited on 2021-10-15
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