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Transient sputter yields of silicon with and without oxygen flooding
Publication:
Transient sputter yields of silicon with and without oxygen flooding
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Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Deleu, Jeroen
;
Brijs, Bert
;
Vandervorst, Wilfried
Journal
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1927
since deposited on 2021-09-30
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last month
Acq. date: 2025-12-15
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Metrics
Views
1927
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-15
Citations